เครื่องวัดชิ้นงานละเอียดเสมือนจริง Video Measuring Machine M-SERIES

M-Series metallographic tool-maker ,microscope adopts the latest Z-axis automatic measuring system which is researched & developed by the SOBEKK itself. With the automatic focusing system, the repeatability can reach 1.5 UM by using the most advanced optical fiber high-defini tion camera, which is the highest accuracy of optical measurement for z-axis measurement of the microscope in China. With the automatic focusing system of Z axis, it greatly reduces the complexity of manual operation. The MC-Series metallographic microscope is equipped with the latest MX infinite distance correction optical lens or NIKON's latest CFI60 infinite high resolution optical lens. Under the observation of a high magnification, the resolution of the workpiece will be increased , and the working distance of the standard high ratio can reach 1mm. Different circumvolve nosepieces can be selected according to your test requirements. The five-hole circumvolve nosepiece can be used for the bright field observation. The bright & dark field or bright & dark field with DIC is available also. The lamp source adopts the international advanced LED lighting to minimize the thermal expansion error that caused by the use of halogen bulb in the past.

By using the integrated MM controller interface support, the latest DP - E1 data processor or SC counter and SBK-MAX data processing software, the MC-300/400 can provide you with excellent geometric data processing & storage capacity. With Electronic handwheel gear device for coarse and fine tuning, it makes the instrument semi-automatic to improve the accuracy.

Applications: precision mould measurement, microelectronic observation and measurement, TFT liquid crystal inspection and measurement, 4''/5''/ 6''/8''/12''/ semiconductor wafer inspection and measurement.

Specifications

Model	M-300	M-400
Table travel range (X Y Z)	300 x 200 x 150 mm	400 x 300 x 150 mm
Dimension	900 x 700 x 980 mm	1000 x 800 x 980 mm
Resolution	0.0001 mm
Accuracy	(2+250/L) um
Repeatability Accuracy	2 um
X Y move style	Manual handle
Z move style	Automatic focus(servo motor)+ Manual pulse handwheel focus(min focal distance 2 um)
CCD	1/2 inch 750 line color camera
Software	SBK-MM
Work table loading	35 Kg
Illuminating System	Cold light source transmission lighting, 10W LED reflection lighting
Nosepiece	Five-hole objective rotary table (with DIC slot)
Optical eyepiece tube	Trinocular tube
Eyepiece	WF 10X/22
Adaptor lens	0.5x
Magnification	10 x -3000 x
Bright filed Lens	LWDPLAN 5X: (N.A) 0.14, working distance :10.8mm
	LWDPLAN 10X: (N.A) 0.25, working distance:10.0mm
	LWDPLAN 20X: (N.A) 0.40, working distance: 4.0 mm
	LWDPLAN 50X: (N.A)0.55, working distance: 7.5 mm
Optical system	CSIC infinity correction optical system
Power	220V±10% ,50Hz , 0.5KW
envirment requiry	temperature range:22±2°C,humidity range:30%-70%
optional parts	100X lens, Dark-field, polarized, DIC(differential interference contrast)